Producer

Tue, 11 May 2010 13:21:40 -0500

Model: PRODUCER

General Information
Technology: DCVD
Platform Type: PRODUCER STANDARD
Wafer Size: 200MM
Wafer Shape: SNNF
Chamber Type / Location
Position A: PECVD
Position B: PECVD
Position C: EMPTY
Position A Process: TEOS
Position B Process: TEOS
Position C Process: EMPTY
Electrical Requirements
Line Voltage: 200/208 VAC
Line Frequency: 50/60 Hz

Producer.

Mon, 10 May 2010 11:54:39 -0500

Model: PRODUCER
Vintage: 2000
Serial No: V166
General Information
Technology: DCVD
Platform Type: PRODUCER STANDARD
Wafer Size: 200MM
Wafer Shape: SNNF
Chamber Type / Location
Position A: PECVD
Position B: PECVD
Position C: EMPTY
Position A Process: TEOS
Position B Process: TEOS
Position C Process: EMPTY
Electrical Requirements
Line Voltage: 200/208 VAC
Line Frequency: 50/60 Hz
Chamber Components ((A) : SACVD)
Manometer: 20/1000TORR DUAL 100TORR: MKS 722A12TCE2FA S/N:000396467
Foreline Maintenance System: DPA : NO
RF Generator 1: AE2000-2V
RF Generator 2: EN1-QUANTA-10
Heater Type: Ceramic Heater
CLEAN METHOD: RPS (AX-7651)
Chamber Components ((B) : EMPTY)
Manometer: 20/1000TORR DUAL 500TORR: MKS 51A52TCA2BA380 S/N:000404544
Foreline Maintenance System: DPA : NO
Endpoint Detector: NO
RF Generator 1: AE2000-2V
RF Generator 2: EN1-QUANTA-10
Heater Type: Ceramic Heater
CLEAN METHOD: RPS (ASTEX FI20620-1)
Gas Panel
Mainframe Type: PRODUCER
Producer S Mainframe Style: PRODUCER STANDARD
Gas Feed: BOTTOM
System Cabinet Exhaust: TOP
MFCs: STEC
Valves: FUJIKIN 5 RA MAX
Filters: MOTT SST 5 RA MAX
Single Line Drop: NO
Regulators: VERIFLO 3 RA
Transducer: MKS 4 RA
(A) - Twin Pallet
Line 1: N2 VENT
Line 3: O2 5SLM SEC-4400
Line 4: N2 PURGE
Line 5: AR 5SLM SEC-4400
Line 6: NF3 4SLM SEC-4400
Line 8: HE 5SLM SEC-4400
Line R2: TEOS 4G/MIN LF410A
(A) - Twin Pallet
Line 1: N2 VENT
Line 3: O2 5SLM SEC-4400
Line 4: N2 PURGE
Line 5: AR 5SLM SEC-4400
Line 6: NF3 4SLM SEC-7340
Line 8: HE 5SLM SEC-4400
Line R2: TEOS 4G/MIN LF410A
General Mainframe
System Placement: STAND ALONE
Facilities Orientation: THROUGH THE FLOOR
EMO Switch Type: TURN TO RELEASE
Transfer Chamber
ROBOT Type: VHP
Slit Valve: SLIT VALVE W/ KALREZ SEAL
Wafer Sensor: YES
System Controller
Controller: UPS
Factory Interface System (200MM)
Front End Interface: MANUAL 2 CASSETTE
ROBOT Type: PRI
Heat Exchanger/Chiller
System Heat Exchanger: NESLAB STEELHEAD 0
Pumps
Process Chamber Pump Ch A: ALCATEL ADS-602P
Process Chamber Pump Ch B: ALCATEL ADS-602P
Process Chamber Pump Ch C:
DPA Generator Rack
DPA Generator Rack: NO
ETC
SBC: V452
LOADLOCK PUMP: EDWARDS IPX