Endura Slab

Tue, 16 Mar 2010 15:41:28 -0500

Model Endura 5500, S/N 0378, Asset # 912, aka 912 E-Liner. Tool was in production until July. Tool is now crated and in storage.
Serial # 0378
BT # 36F0239AE
CEMS ID 00091200
Software 8.8
Loc 322/C8
L/L Type Standard
SMIF Type ARM-2200
Robot VHP/HP
Ch A Etch
Ch B Cool
CH E & F Degas/Orient
CH 5 Holding
Chamber Type Titanium Al W IMP Ti TiN
Chambers D 1 2 3 4
Chamber body Standard Standard Widebody Widebody Widebody
Water Cooled? No No No No Yes
Magnet Type Durasource Durasource Durasource RH-2 G-12
Magnet P/N 0010-20328 0010-20328 0010-20328 0010-21676 0010-20768
Magnet to target spacing (mm) 1.5 2.2 1.5 1.0mm 1.0
Magnet rotation speed (RPM) 95 95 95 90 90
Source Type Durasource Durasource Durasource RH-2 G-12
Source Adapter 0020-23046 0020-23042 0020-22496 0040-22274 0020-22982
Power Supply MDX-L12 MDX-L12M MDX-L12-650 MDX-L12M MDX-L12
MDX-L12 HFV-8000
CX-600S
Target Type 0.46" Titanium Al/0.5% Cu 0.25" W .25' vectra 0.35" G-12

Endura Slab

Tue, 16 Mar 2010 14:37:13 -0500

Model Endura 5500, S/N , Asset # 914, aka 914 E-Slab. Tool was in production until July. Tool is now crated and in storage.

Serial # 321489
BT # P000239AF
CEMS ID 84700
Software 8.89
Loc 322/D12
L/L Type Wide Body
SMIF Type LPT 2200
Robot VHP/HP+
Ch A Etch
Ch B Cool
CH E & F Degas/Orient
CH 5 Holding
Chamber Type Co IMP Ti W TiN
Chamber Slot 1 2 3 4
Chamber body Widebody Widebody Widebody Widebody
Water Cooled? No No No No
Magnet Type A RH-2 Durasource G-12
Magnet P/N 0010-20328 0010-21676 0010-20328 0010-20768
Magnet to target spacing (mm) 2.2 1.0mm 1.5 1.0
Magnet rotation speed (RPM) 95 90 95 90
Source Type A RH-2 Durasource G-12
Source Adapter 0020-23046 0040-22274 0020-22496 0020-22982
Power Supply Halo MDX-L12M MDX-L12 MDX-L 12M
HFV-8000
CX-600S
Target Type .125" Co .25' vectra 0.25" W 0.35" G-12
Target P/N n/a P2L8872 P23H8078 P2L8607
914
914
Target life (kwhrs) 75 1000 430 800
Kit Life 75 1000/1350 430 400
Ring Type Cover Ceramic Cover Cover
Bake out after tgt/kit change 2hrs 2hrs 2hrs 2hrs
Target to wafer spacing 50 mm 140 100 mm 55 mm
Pedestal Type 101 Bias 101 101
Cryo pump type (# phase) PWH0428 PWH0428 PWH0428 PWH0428
Compressor P701865 P701865 P701865 P701865
Litres before regen 800 800 800 800
Bake out lamp setpoint 30% 30% 30% 30%
Base Pressure setpoint 0.5 0.1 0.5 0.5
Gases configured to chamber Ar Ar Ar Ar, N2