http://www.asiatechcorp.com/AsiaTech/Centura/Centura.html Equipments, tools, materials, technology owned by Asia Tech Corporation iWeb 3.0.4 http://www.asiatechcorp.com/AsiaTech/Centura/Centura_files/LOGOcut_1.png http://www.asiatechcorp.com/AsiaTech/Centura/Centura.html http://www.asiatechcorp.com/AsiaTech/Centura/Entries/2010/3/18_4_chamber_Nitride_Centura.html c5ab0af6-8213-4536-a824-685fdf17fd4a Thu, 18 Mar 2010 13:39:38 -0500 <a href="http://www.asiatechcorp.com/AsiaTech/Centura/Entries/2010/3/18_4_chamber_Nitride_Centura_files/+t-1%20034.jpg"><img src="http://www.asiatechcorp.com/AsiaTech/Centura/Media/object184.png" style="float:left; padding-right:10px; padding-bottom:10px; width:252px; height:189px;"/></a>3 chamber Universal CVD with lamp Heated<br/>1 chamber Multislot cool down chamber<br/>Narrow Body Load locks<br/>1 HP Robot<br/> http://www.asiatechcorp.com/AsiaTech/Centura/Entries/2010/3/18_Applied_Materials_5200_Centura_2_chamber_Super_E_Poly_Etcher.html 28d23562-9220-4ded-a38f-532e790c1857 Thu, 18 Mar 2010 13:09:19 -0500 <a href="http://www.asiatechcorp.com/AsiaTech/Centura/Entries/2010/3/18_Applied_Materials_5200_Centura_2_chamber_Super_E_Poly_Etcher_files/super%20e.jpg"><img src="http://www.asiatechcorp.com/AsiaTech/Centura/Media/object212_1.png" style="float:left; padding-right:10px; padding-bottom:10px; width:252px; height:189px;"/></a>Voltage / Frequency Options : 208Vac / 60Hz / 400Amp<br/>Wafer Size and Shape Options : 200mm  /  Flat<br/>Soft Ware Version : 4.8_26<br/>Robot Type : VHP+<br/>Loadlock Type : Narrow Body<br/>Umbilical Cable Options : Standard<br/>Chamber #A Type : Super-e<br/>Chamber #A Process : Oxide<br/>Chamber #B Type : Super-e<br/>Chamber #B Process : Oxide<br/>Gas Panal Type : Standard<br/>Gas Feed Options : Bottom Feed<br/>Gas Panal Exhaust Options : Top Feed<br/>  VME Rack Options : Standard<br/>Generator Rack Options : Standard<br/>End Point Options: Monocrometer<br/> http://www.asiatechcorp.com/AsiaTech/Centura/Entries/2010/3/18_Centura_5200_DPS+_Poly_etcher_3_chamber_system.html 5bcac5f7-6edb-4fd4-9063-2b9e630e72f4 Thu, 18 Mar 2010 12:20:00 -0500 <a href="http://www.asiatechcorp.com/AsiaTech/Centura/Entries/2010/3/18_Centura_5200_DPS+_Poly_etcher_3_chamber_system_files/A%20006.jpg"><img src="http://www.asiatechcorp.com/AsiaTech/Centura/Media/object213_1.png" style="float:left; padding-right:10px; padding-bottom:10px; width:252px; height:189px;"/></a>Voltage / Frequency Options : 208VAC / 60Hz / 250Amp<br/>Wafer Size and Shape Options: 200mm / Flat<br/>Soft Ware Version : 4.8_26<br/>Robot Type : VHP+<br/>Loadlock Type :  Narrow Body         <br/>Umbilical Cable Options : Standard   <br/>Chamber #A Type : Mxp+ Poly ESC<br/>Chamber #A Process : POLY ETCH<br/>Chamber #B Type : Mxp+ Poly ESC<br/>Chamber #B Process : POLY ETCH<br/>Chamber #C Type : Mxp+ Poly ESC<br/>Chamber #C Process : POLY ETCH<br/>Gas Panal Type : Standard<br/>Gas Feed Options : Bottom Feed<br/>Gas Panal Exhaust Options : Top Feed<br/>VME Rack Options : Standard<br/>Generator Rack Options : Standard<br/>End Point Options: Monocrometer<br/> http://www.asiatechcorp.com/AsiaTech/Centura/Entries/2010/3/16_Applied_Material_Centura_5200_MXP+_poly_Etch.html 65a74f7c-a42d-44a5-ab01-34cc054af6e3 Tue, 16 Mar 2010 18:04:25 -0500 <a href="http://www.asiatechcorp.com/AsiaTech/Centura/Entries/2010/3/16_Applied_Material_Centura_5200_MXP+_poly_Etch_files/EAE701%20007.jpg"><img src="http://www.asiatechcorp.com/AsiaTech/Centura/Media/object187.png" style="float:left; padding-right:10px; padding-bottom:10px; width:252px; height:189px;"/></a>3 chamber MXP+ platform<br/>1 Chamber Cool Down<br/>VHP+ Robot<br/>Endpoint computer: Yes<br/>Load Lock: Heated Narrow Body<br/>Expanded VME<br/>